Описание

Motorized XY Stage
Model VK-S110
Movement direction X and Y axes
Stroke 100x100 mm
Table size 140x140 mm
Guide method Cross roller guide
Feed method Precise pole screw, lead: 1 mm
Axis converted inertia X axis: 9.29 ? 10-7 kg·m2, Y axis: 9.62 ? 10-7 kg·m2
Motor 0.35 A/phase, 5-phase stepping motor, 5-wire pentagon wiring, holding torque: 0.017 N m, rotor inertia 4.2 g·cm2
Resolution 1 µm
Positioning accuracy 10 µm
Repeated positioning accuracy ±1 µm
Rebound 1 µm
Lost motion 3 µm
Intuition (vertical/horizontal) 15 µm
Parallelism A X: 20 µm, Y: 20 µm
XY squareness 15 µm
Load capacity 3 kg
Main material/outline Aluminum alloy, black alumite finish
Weight 3.7 kg
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