Описание

Measurement Head
Model IM-7030
Type Head Wide stage model incorporating programmable ring-illumination/light probe unit
Image sensor 1” 6.6 mega pixel monochrome CMOS
Display 10. 4” LCD monitor (XGA: 1024 ? 768)
Receiver lens Double telecentric lens
Image measurement Field of view Wide-field measurement mode: 300 mm ? 200 mm (4? R50) High-precision measurement mode: 225 ? 125 mm
Minimum display unit 0.1 µm
Repeatability W/o stage movement Wide-field measurement mode: ±1 µm High-precision measurement mode: ±0.5 µm
With stage movement Wide-field measurement mode: ±2 µm High-precision measurement mode: ±1.5 µm
Measurement accuracy (±2?) W/o binding Wide-field measurement mode: ±5 µm*1 High-precision measurement mode: ±2 µm*2
With binding Wide-field measurement mode: ±(7 + 0.02 L) µm*3 High-precision measurement mode: ± (4 + 0.02 L) µm*4
Light probe Measurement Measurable area (XY) 190 ? 90 mm
Maximum measurement depth 30 mm
Light probe diameter o3 mm
Measuring force 0.015 N
Repeatability ±2 µm*5
Measurement accuracy ±(8 + 0.02 L) µm*6
External remote input Non-voltage input (with and without contact)
External output OK/NG/FAIL/MEAS. PhotoMos output Rated load 24 VDC 0.5 A ON resistance 50 m? or lower
Interface LAN RJ-45 (10BASE-T/100BASE-TX/1000BASE-T)
USB 2.0 series A 6 ports (front: 2, rear: 4)
Record Hard disk drive 500 GB
Illumination system Transparent Telecentric transparent illumination
Ring Four division, multi-angle illumination (electric) Slit ring (directivity) illumination (electric)
XY stage Moving range 200 ? 100 mm (electric)
Withstand load 7.5 kg
Z stage Moving range 75 mm (electric)
Power supply Power voltage 100–240 VAC, 50/60 Hz
Current consumption 430 VA or lower
Environmental resistance Operating ambient temperature +10°C to 35°C
Operating ambient humidity 20% RH to 80% RH (no condensation)
Weight Approx. 33 kg
*1 In the range of o80 mm, within the operating ambient temperature range of +23°C ±1°C at the focused focal point position *2 In the range of o20 mm within the operating ambient temperature range of +23°C ±1°C at the focused focal point position *3 In the range of 280 ? 180 mm (4? R40), within the operating ambient temperature range of +23°C ±1°C at the focused focal point position, and with a load weighing 3 kg or less on the stage (L = amount of stage movement in mm units) *4 In the range of 220 ? 120 mm, within the operating ambient temperature range of +23°C ±1°C at the focused focal point position, and with a load weighing 3 kg or less on the stage (L = amount of stage movement in mm units) *5 When the detection system is standard. If the detection system is at a deep position, then ±3 µm *6 When the detection system is standard, and the ambient temperature is +23°C ±1°C, with a stage load weighing 3 kg or less. If the detection system is at a deep position,then ±(10 + 0.02 L) µm with L as the measurement length in mm.
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